000 00879nam a2200289 i 4500
001 006506
003 OSt
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008 150107s1996 nyu#################eng#d
040 _aCO-ViULL
_erda
_bspa
041 0 _aeng
043 _axxu
082 0 4 _a621.38152
_bS828
100 1 _aStephen A, Campbell
_96156,
_eautor.
_4aut
245 1 4 _aThe Sciencie and Engineering of Microelectronic Fabrication /
_cCampbell Stephen A.
264 1 _aNew York :
_bOxford University Press,
_c1996.
300 _bilustraciones.
336 _atexto
_btxt
_2rdacontent
337 _asin mediación
_bn
_2rdamedia
338 _avolumen
_bnc
_2rdacarrier
650 0 7 _aSEMICONDUCTORES - DISEÑO Y CONSTRUCCION
_96157.
650 0 7 _aMICROELECTRONICA
_96158.
650 0 7 _aCIRCUITOS INTEGRADOS
_96159.
650 0 7 _aFACTORES DE CONVERSION
_96160.
942 _2ddc
_cBK
999 _c6504
_d6504