TY  - BOOK
AU  - Stephen A,Campbell
TI  - The Sciencie and Engineering of Microelectronic Fabrication
U1  - 621.38152 
PY  - 1996///
CY  - New York
PB  - Oxford University Press
KW  - SEMICONDUCTORES - DISEÃO Y CONSTRUCCION
KW  - MICROELECTRONICA
KW  - CIRCUITOS INTEGRADOS
KW  - FACTORES DE CONVERSION
ER  -